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期刊名:Materials science in semiconductor processing

缩写:MAT SCI SEMICON PROC

ISSN:1369-8001

e-ISSN:1873-4081

IF/分区:5.2/Q1

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共收录本刊相关文章索引3
Clinical Trial Case Reports Meta-Analysis RCT Review Systematic Review
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Jesse S Hyslop,Amanda R Boydstun,Theron R Fereday et al. Jesse S Hyslop et al.
As an obvious candidate for a p-type dopant in ZnO, nitrogen remains elusive in this role. Nitrogen containing precursors are a potential means to incorporate nitrogen during MOCVD growth. One class of nitrogen-containing precursors are zin...
H J Pandya,Hyun Tae Kim,Rajarshi Roy et al. H J Pandya et al.
In the present work, we report fabrication and characterization of a low-cost MEMS based piezoresistive micro-force sensor with SU-8 tip using laboratory made silicon-on-insulator (SOI) substrate. To prepare SOI wafer, silicon film (0.8 µm...