MEMS based Low Cost Piezoresistive Microcantilever Force Sensor and Sensor Module
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In the present work, we report fabrication and characterization of a low-cost MEMS based piezoresistive micro-force sensor with SU-8 tip using laboratory made silicon-on-insulator (SOI) substrate. To prepare SOI wafer, silicon film (0.8 µm thick) was deposite... ...
