Traceable localization enables accurate integration of quantum emitters and photonic structures with high yield [0.03%]
可追踪定位技术实现量子发射体与光子结构的高产率精准集成
Craig R Copeland,Adam L Pintar,Ronald G Dixson et al.
Craig R Copeland et al.
In a popular integration process for quantum information technologies, localization microscopy of quantum emitters guides lithographic placement of photonic structures. However, a complex coupling of microscopy and lithography errors degrad...