Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy [0.03%]
基于化学与机械协同作用的BEOL金属互连线研磨机理研究
Zhiqiang Tian,Shizhao Wang,Rui Li et al.
Zhiqiang Tian et al.
Chemical mechanical polishing (CMP) is the sole process capable of achieving the required flatness and surface roughness for photolithography without any obvious distortion in the multilevel metal interconnects. As semiconductor manufacturi...
A local de-insulation method and its application in neural microneedle array [0.03%]
一种局部去绝缘的方法及其在神经微针阵列中的应用研究
Xin Zhao,Chunrong Wei,Deguang Zhu et al.
Xin Zhao et al.
Silicon-based neural microneedle arrays, such as the Utah Array, have demonstrated excellent performance in chronic recordings from the cerebral cortex. Unlike planar thin-film electrodes with recording sites arranged on the surface of a si...
Zeyu Jia,Yuhao Wang,Xiaoxu Wang et al.
Zeyu Jia et al.
Perforated structures are widely employed in MEMS devices for dissipation control, energy absorption, and performance optimization. Among these, the damping weakening effect is particularly intriguing, attracting considerable attention and ...
A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration [0.03%]
一种片上密封硅腔体微声学平台用于射频集成
Jiashuai Xu,Zijun Ren,Fangsheng Qian et al.
Jiashuai Xu et al.
This study presents a wafer-level sealed silicon cavity (SSC) microacoustic integration platform to address the limitations in the cavity Silicon-on-Insulator (C-SOI) wafers for the 5G/6G wireless communication system. The proposed SSC plat...
A tough semi-dry hydrogel electrode with anti-bacterial properties for long-term repeatable non-invasive EEG acquisition [0.03%]
一种具有抗菌性的耐久型半干水凝胶电极用于长期可重复的非侵入式脑电采集
Dongyang Wang,Hailing Xue,Long Xia et al.
Dongyang Wang et al.
Non-invasive brain-computer interfaces (NI-BCIs) have garnered significant attention due to their safety and wide range of applications. However, developing non-invasive electroencephalogram (EEG) electrodes that are highly sensitive, comfo...
Ian H White,Tianhong Cui
Ian H White
Centrifugation-assisted lateral flow assay platform: enhancing bioassay sensitivity with active flow control [0.03%]
离心辅助侧流分析平台：利用主动流量控制提高生物检测灵敏度
Hang Yuan,Ruiqi Yong,Wenwen Yuan et al.
Hang Yuan et al.
Lateral flow assays (LFAs) are widely used in point-of-care testing (POCT) due to their simplicity and rapid operation. However, their reliance on passive capillary flow limits sensitivity, making it challenging to detect low-abundance biom...
0.32 mHz frequency mismatch of micro-shell resonator gyroscope without tuning electrodes achieved by ultra-precision mechanical trimming [0.03%]
无调谐电极的微壳谐振陀螺频率Mismatch值达到0.32毫赫兹
Sheng Yu,Xianfeng Huang,Jiangkun Sun et al.
Sheng Yu et al.
The frequency mismatch caused by material defects and geometric errors during the manufacturing process is a critical factor limiting the performance of micro-shell resonator gyroscope (MSRG). Compared with other MEMS gyroscopes, the freque...
A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator [0.03%]
一种基于弱耦合谐振腔的高性能宽量程真空传感器
Jiaxin Qin,Wenliang Xia,Junbo Wang et al.
Jiaxin Qin et al.
Wide-range vacuum sensors (0.1-105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide ra...
Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators [0.03%]
非互易传输的非线性失真在宇称-时间对称的硅微机械谐振器中的研究
Rui Wang,Lei Han,Man-Na Zhang et al.
Rui Wang et al.
Parity-time (PT) symmetric resonators have an exact phase with real frequency eigenvalues and a broken phase with complex-conjugate frequency eigenvalues. In the presence of nonlinear gain, the PT-symmetric resonator exhibits nonreciprocal ...