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期刊名:Microsystems & nanoengineering

缩写:MICROSYST NANOENG

ISSN:2055-7434

e-ISSN:2055-7434

IF/分区:9.9/Q1

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共收录本刊相关文章索引1096
Clinical Trial Case Reports Meta-Analysis RCT Review Systematic Review
Classical Article Case Reports Clinical Study Clinical Trial Clinical Trial Protocol Comment Comparative Study Editorial Guideline Letter Meta-Analysis Multicenter Study Observational Study Randomized Controlled Trial Review Systematic Review
Chang Ge,Edmond Cretu Chang Ge
Piezoelectric accelerometers excel in vibration sensing. In the emerging trend of fully organic electronic microsystems, polymeric piezoelectric accelerometers can be used as vital front-end components to capture dynamic signals, such as vo...
Useung Lee,Hyein Kim,Dong Kyo Oh et al. Useung Lee et al.
We present an azimuthal-rotation-controlled dynamic nanoinscribing (ARC-DNI) process for continuous and scalable fabrication of asymmetric nanograting structures with tunable periods and shape profiles. A sliced edge of a nanograting mold, ...
Geonsoo Jin,Neil Upreti,Joseph Rich et al. Geonsoo Jin et al.
Large-field nanoscale fluorescence imaging is invaluable for many applications, such as imaging subcellular structures, visualizing protein interactions, and high-resolution tissue imaging. Unfortunately, conventional fluorescence microscop...
Cheng Tu,Xu-Heng Ou-Yang,Ying-Jie Wu et al. Cheng Tu et al.
This work presents a single-structure 3-axis Lorentz force magnetometer (LFM) based on an AlN-on-Si MEMS resonator. The operation of the proposed LFM relies on the flexible manipulation of applied excitation currents in different directions...
Jiaming Liu,Jingui Qian,Murtazt Adil et al. Jiaming Liu et al.
An electronic tongue (E-tongue) comprises a series of sensors that simulate human perception of taste and embedded artificial intelligence (AI) for data analysis and recognition. Traditional E-tongues based on electrochemical methods suffer...
Yasser S Shama,Sasan Rahmanian,Hamza Mouharrar et al. Yasser S Shama et al.
This paper investigates the fundamental sensing mechanism of electrostatic MEMS gas sensors. It compares among the responsivities of a set of MEMS isopropanol sensors before and after functionalization, and in the presence and absence of el...
Zhaosu Wang,Ning Li,Xinru Yang et al. Zhaosu Wang et al.
Sensing of both temperature and strain is crucial for various diagnostic and therapeutic purposes. Here, we present a novel hydrogel-based electronic skin (e-skin) capable of dual-mode sensing of temperature and strain. The thermocouple ion...
Cunkai Zhou,Ye Tian,Gen Li et al. Cunkai Zhou et al.
In implantable electrophysiological recording systems, the headstage typically comprises neural probes that interface with brain tissue and integrated circuit chips for signal processing. While advancements in MEMS and CMOS technology have ...
Hyunjung Kang,Dongkyo Oh,Nara Jeon et al. Hyunjung Kang et al.
Nanoimprint lithography (NIL) has been utilized to address the manufacturing challenges of high cost and low throughput for optical metasurfaces. To overcome the limitations inherent in conventional imprint resins characterized by a low ref...
Chenxu Zhu,Huseyin Ekinci,Aixi Pan et al. Chenxu Zhu et al.
E-beam lithography is a powerful tool for generating nanostructures and fabricating nanodevices with fine features approaching a few nanometers in size. However, alternative approaches to conventional spin coating and development processes ...