Development of leadless packaged heavily doped N-type 4H-SiC pressure sensor family for harsh environments [0.03%]
用于恶劣环境的无引线封装高掺杂N型4H-SiC压力传感器家族的研发
Lukang Wang,Nuo Wan,Yu Yang et al.
Lukang Wang et al.
In many industries, there is a growing demand for semiconductor pressure sensors capable of operating in harsh environments with extremely high and low temperatures and high vibrations. Utilizing the piezoresistive effect of heavily doped N...
Ultra-sensitive micro thermoelectric device for energy harvesting and ultra-low airflow detection [0.03%]
超灵敏微热电装置用于能量采集和极低气流检测
Bo Yan,Jiaxiang Wang,Yi Chen et al.
Bo Yan et al.
Micro thermoelectric device (μ-TED) emerges with great attention in energy generation, thermal management, and heat sensing applications. However, the large sensitive area is necessary to accommodate enough thermoelectric couples (TCs) for...
Identification and trimming of the unbalanced mass in micro hemispherical resonators based on an elastic electrode substrate [0.03%]
基于弹性电极基底的微半球谐振器不平衡质量的识别与剪裁
Yimo Chen,Yan Shi,Xiang Xi et al.
Yimo Chen et al.
This study presents a scheme for the identification and trimming of the first three harmonics of mass defects in micro hemispherical resonators (MHRs), aiming to refine their mass balancing techniques. Given the manufacturing and structural...
Pulse-driven MEMS gas sensor combined with machine learning for selective gas identification [0.03%]
基于脉冲驱动的MEMS气体传感器结合机器学习的选择性气体识别方法
Wenxin Luo,Fa Dai,Yijun Liu et al.
Wenxin Luo et al.
The sensing and identification of trace gases are essential for ensuring chemical safety and protecting human health. This study introduces a low-power electronic nose system that utilizes a single sensor driven by repeated pulsed power inp...
Multi-DoF AlN-on-SOI BAW MEMS resonators with coated ZIF-8 for gas sensing application [0.03%]
用于气体传感的多自由度AlN-on-SOIBAW MEMS谐振器及其ZIF-8涂层
Linlin Wang,Yuan Wang,Max Tietze et al.
Linlin Wang et al.
This paper explored the practical utility of gas sensing applications based on the multi-degree-of-freedom (Multi-DoF) bulk acoustic wave (BAW) resonant sensors, including 1, 2, and 3-DoF devices, where piezoelectric actuation and sensing m...
Gecko-inspired soft actuators for wafer handling via overcuring-induced anisotropic microstructures in DLP 3D printing [0.03%]
基于DLP 3D打印过固化诱导各向异性微结构的软执行器用于晶圆搬运
Sooheon Kim,Jongwon Kim,Sangbo Seo et al.
Sooheon Kim et al.
The anisotropic setae structures of geckos demonstrate a natural anisotropic response to external forces, thereby enabling rapid and repeated attachment and detachment. Considering this biological mechanism, this study proposes an innovativ...
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor [0.03%]
一种内置充电存储电容的预充电CMUT结构的无线超声波能量传输方法
Muhammetgeldi Annayev,Feysel Yalçın Yamaner,Ömer Oralkan
Muhammetgeldi Annayev
Capacitive micromachined ultrasonic transducer (CMUT) technology is a potential candidate to implement an ultrasonic power receiver for implantable medical devices (IMDs) because CMUT technology employs photolithography-based microfabricati...
Levitation and controlled MHz rotation of a nanofabricated rod by a high-NA metalens [0.03%]
高NA金属enses实现纳米制造棒的悬浮和兆赫级旋转控制
Hailong Pi,Chuang Sun,Kian Shen Kiang et al.
Hailong Pi et al.
An optically levitated nanoparticle in a vacuum provides an ideal platform for ultra-precision measurements and fundamental physics studies because of the exceptionally high-quality factor and rich motion modes, which can be engineered by m...
Anti-aliasing multi-bit sigma-delta modulated cobweb-like disk resonator gyroscope with extending input range [0.03%]
一种抗混叠多比特ΣΔ调制蛛网状盘谐振陀螺及其扩频输入方法
Bo Fan,Shihao Du,Jingchuan Zhou et al.
Bo Fan et al.
A novel cobweb-like disk resonator gyroscope (CDRG) is introduced in this paper, which integrates a multi-bit electro-mechanical sigma-delta modulation (ΣΔΜ) system to significantly expand the input angular rate signal range, improving p...
Extracellular vesicle-based point-of-care testing for diagnosis and monitoring of Alzheimer's disease [0.03%]
基于细胞外囊泡的阿尔茨海默病诊断和监测即时检测技术
Xiang Li,Jie Chen,Yang Yang et al.
Xiang Li et al.
Extracellular vesicles (EVs) show potential for early diagnosis of Alzheimer's disease (AD) and monitoring of its progression. However, EV-based AD diagnosis faces challenges due to the small size and low abundance of biomarkers. Here, we r...