Ieee transactions on device and materials reliability文章索引

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期刊名：Ieee transactions on device and materials reliability

缩写：IEEE T DEVICE MAT RE

ISSN：1530-4388

e-ISSN：1558-2574

IF/分区：2.3/Q3

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Wafer-Level Electrically Detected Magnetic Resonance: Magnetic Resonance in a Probing Station [0.03%] 片上电检测磁共振技术：探针站中的磁共振技术研究

Duane J McCrory,Mark A Anders,Jason T Ryan et al. Duane J McCrory et al.

We report on a novel semiconductor reliability technique that incorporates an electrically detected magnetic resonance (EDMR) spectrometer within a conventional semiconductor wafer probing station. EDMR is an ultrasensitive electron paramag...

IEEE transactions on device and materials reliability : a publication of the IEEE Electron Devices Society and the IEEE Reliability Society. 2018:18:10.1109/TDMR.2018.2817341. DOI:10.1109/TDMR.2018.2817341 2018