J G Pope,K A Gillis,A N Johnson et al.
J G Pope et al.
Numerous process gases are used in the production of semiconductor chips. Accurate metering of these gases into process chambers is critical for maximizing device throughput and yield. A national flow standard for semiconductor process gase...
Fábio Ouverney Costa,Jodie G Pope,Keith A Gillis
Fábio Ouverney Costa
Coriolis mass flowmeters are used for many applications, including as transfer standards for proficiency testing and liquified natural gas (LNG) custody transfer. We developed a model to explain the temperature dependence of a Coriolis mete...
Laminar flowmeter for mechanical ventilator: Manufacturing challenge of Covid-19 pandemic [0.03%]
机械通风用层流流量计：新冠肺炎疫情期间的制造挑战
Jaafar Alsalaet,Basil Sh Munahi,Raheem Al-Sabur et al.
Jaafar Alsalaet et al.
The rapid and sudden attack of the covid-19 pandemic has emerged the urgent need for pulmonary resuscitation devices (ventilators). The airflow sensor is a main element in the ventilator. Sensing very low airflow rates is an essential requi...
Progress Towards a Gas-Flow Standard using Microwave and Acoustic Resonances [0.03%]
基于微波和声学共振的气体流量标准研究进展
Jodie G Pope,Keith A Gillis,Michael R Moldover et al.
Jodie G Pope et al.
We describe our progress in developing a novel gas flow standard that utilizes 1) microwave resonances to measure the volume, and 2) acoustic resonances to measure the average gas density of a collection tank / pressure vessel. The collecti...
Uncertainty estimates of tracer gas dilution flow measurements in large-scale exhaust ducts [0.03%]
示踪气体稀释法测量大型排风管道流量的不确定度估算公式
Rodney A Bryant
Rodney A Bryant
Accurate measurements of volume or mass flow in large conduits can be difficult to achieve due to non-ideal flow characteristics such as asymmetry of the velocity profile and off-axis flow components due to swirl. The tracer gas dilution me...
Jodie G Pope,John D Wright
Jodie G Pope
The National Institute of Standards and Technology (NIST) developed a prototype field test standard (FTS) that incorporates three test methods that could be used by state weights and measures inspectors to periodically verify the accuracy o...