A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers [0.03%]
一种适用于压电换能器的无残留Pt陶瓷PZT材料一步式干法制备工艺
Haoran Wang,Manish Godara,Zhenfang Chen et al.
Haoran Wang et al.
Lead zirconate titanate (PZT) has wide applications in microelectromechanical systems (MEMS) due to its large piezoelectric coefficients. However, there exist serious issues during PZT wet etching even with multiple etching steps, such as r...
Nikolai Klimov,Thomas Purdy,Zeeshan Ahmed
Nikolai Klimov
Resistance thermometry provides a time-tested method for taking temperature measurements that has been painstakingly developed over the last century. However, fundamental limits to resistance-based approaches along with a desire to reduce t...
On the theoretical maximum achievable signal-to-noise ratio (SNR) of piezoelectric microphones [0.03%]
压电麦克风所能实现的最大信号噪声比（SNR）的理论值分析
Yoonho Seo,Daniel Corona,Neal A Hall
Yoonho Seo
A theoretical maximum achievable signal to noise ratio (SNR) for piezoelectric microphones is identified as a function of only microphone volume irrespective of architecture and construction details. For a given piezoelectric material, micr...
Liban Jibril,Julián Ramírez,Aliaksandr V Zaretski et al.
Liban Jibril et al.
This article describes the fabrication of single-nanowire strain sensors by thin sectioning of gold films with an ultramicrotome-i.e., "nanoskiving." The nanowire sensors are transferred to various substrates from the water bath on which th...
An Angstrom-sensitive, differential MEMS capacitor for monitoring the milliliter dynamics of fluids [0.03%]
一种灵敏度达埃级的微机电差分电容及其在液体毫升级动态监测中的应用研究中文标题
David J Apigo,Philip L Bartholomew,Thomas Russell et al.
David J Apigo et al.
A device, with MEMS sensors at its core, has been fabricated and tested for measuring low fluid pressure and slow flow rates. The motivation was to measure clinically relevant ranges of slow-moving fluids in living systems, such as the cere...
A Wireless Implantable Micropump for Chronic Drug Infusion Against Cancer [0.03%]
一种用于对抗癌症的慢性药物输送无线植入微泵
Angelica Cobo,Roya Sheybani,Heidi Tu et al.
Angelica Cobo et al.
We present an implantable micropump with a miniature form factor and completely wireless operation that enables chronic drug administration intended for evaluation and development of cancer therapies in freely moving small research animals ...
Demonstration that a new flow sensor can operate in the clinical range for cerebrospinal fluid flow [0.03%]
新的流量传感器能够操作在脑脊液流动的临床范围内被验证
Rahul Raj,Shanmugamurthy Lakshmanan,David Apigo et al.
Rahul Raj et al.
A flow sensor has been fabricated and tested that is capable of measuring the slow flow characteristic of the cerebrospinal fluid in the range from less than 4 mL/h to above 100 mL/h. This sensor is suitable for long-term implantation becau...
A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage [0.03%]
一种基于电热驱动微机电扫描台的非共振光纤扫描仪
Xiaoyang Zhang,Can Duan,Lin Liu et al.
Xiaoyang Zhang et al.
Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the...
Circular test structure for the determination of piezoelectric constants of Sc x Al1- x N thin films applying Laser Doppler Vibrometry and FEM simulations [0.03%]
基于激光多普勒 vibrometry 和有限元仿真的ScxAl1-xN 薄膜压电常数的圆形单元测试结构测定方法
P M Mayrhofer,H Euchner,A Bittner et al.
P M Mayrhofer et al.
Piezoelectric scandium aluminium nitride (Sc x Al1-x N) thin films offer a large potential for the application in micro electromechanical systems, as advantageous properties of pure AlN thin films are maintained, but combined with an increa...
Angled-focused 45 MHz PMN-PT single element transducer for intravascular ultrasound imaging [0.03%]
用于血管内超声成像的倾斜聚焦45MHz PMN-PT单个元件换能器
Sangpil Yoon,Jay Williams,Bong Jin Kang et al.
Sangpil Yoon et al.
A transducer with an angled and focused aperture for intravascular ultrasound imaging has been developed. The acoustic stack for the angled-focused transducer was made of PMN-PT single crystal with one matching layer, one protective coating...