A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers
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Lead zirconate titanate (PZT) has wide applications in microelectromechanical systems (MEMS) due to its large piezoelectric coefficients. However, there exist serious issues during PZT wet etching even with multiple etching steps, such as residues on etching f... ...
