On-chip infrared spectroscopic gas sensing using a hollow-core anti-resonant reflecting optical waveguide (ARROW) with a large external confinement factor (ECF) was rarely reported due to the complex fabrication process and polarization dependence. Alternatively, we proposed ARROW gas sensors using chalcogenide (ChG) anti-resonant layers which require thermal evaporation and epoxy resin bonding for fabrication instead of the complicated wafer bonding process. Polarization characteristics and ethylene (C2H2) sensing performance at 1.532 μm were measured for two ARROW sensors with four-side (WG_A) and three-side (WG_B) anti-resonant layers around the hollow-core. Due to a symmetric structure, the 1 cm-long WG_A sensor exhibits polarization-insensitive characteristics, which does not require an additional polarization controller for integrated on-chip sensors and enhances the stability and reliability of the sensor under fluctuating polarization states. A high ECF of 71% and a 1σ limit of detection (LoD) of ∼23 parts-per-million (ppm) for WG_A were achieved at an averaging time of 39.2 s. The broadband multi-gas detection capability of WG_A was verified through C2H2 detection at 1.532 μm and CH4 at 1.654 μm, highlighting the potential of ARROWs for on-chip multi-gas sensing.
Lab on a chip. 2025 Mar 4. doi: 10.1039/d4lc00971a Q15.42025
On-chip near-infrared multi-gas sensing using chalcogenide anti-resonant hollow-core waveguides
使用类硫属化合物反共振空芯波导在芯片上进行近红外多气体检测 翻译改进
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DOI: 10.1039/d4lc00971a PMID: 40035412
摘要 Ai翻译
关键词:近红外多气体传感; 类硫族反共振空芯波导