Effects of processing parameters on 3D structural ordering and optical properties of inverse opal photonic crystals produced by atomic layer deposition [0.03%]
原子层沉积法制备反蛋白石光子晶体时，工艺参数对三维结构有序性及光学性能的影响
Campos, Heloisa G.; Furlan, Kaline P.; Garcia et al.
Campos et al.