Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit [0.03%]
侧向尖端控制效应在CD-AFM计量中的研究：大尺寸探针限制的研究
Ronald G Dixson,Ndubuisi G Orji,Ryan S Goldband
Ronald G Dixson
Sidewall sensing in critical dimension atomic force microscopes (CD-AFMs) usually involves continuous lateral dithering of the tip or the use of a control algorithm and fast response piezo actuator to position the tip in a manner that resem...
Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression [0.03%]
基于贝叶斯和联合回归的混合计量优化方法研究
Mark-Alexander Henn,Richard M Silver,John S Villarrubia et al.
Mark-Alexander Henn et al.
Hybrid metrology, e.g., the combination of several measurement techniques to determine critical dimensions, is an increasingly important approach to meet the needs of the semiconductor industry. A proper use of hybrid metrology may yield no...
SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications [0.03%]
一种具有孔、流体通道和感应装置的SU-8微悬臂梁及其在生物和其他领域的应用
Angelo Gaitas,Robert W Hower
Angelo Gaitas
We describe a method for fabricating an aperture on a fluidic cantilever device using SU-8 as a structural material. The device can ultimately be used for patch clamping, microinjections, fluidic delivery, fluidic deposition, and micromater...
Development path and current status of the NANIVID: a new device for cancer cell studies [0.03%]
NANIVID新型仪器的发展历程及现状分析：癌症细胞研究新工具
Waseem Khan Raja,Michael R Padgen,James K Williams et al.
Waseem Khan Raja et al.
Cancer cells create a unique microenvironment in vivo that enables migration to distant organs. To better understand the tumor micro-environment, special tools and devices are required to monitor the interactions between different cell type...
Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides [0.03%]
空心反谐振无反射光波导的微孔和纳米孔制造技术
Matthew R Holmes,Tao Shang,Aaron R Hawkins et al.
Matthew R Holmes et al.
We demonstrate the fabrication of micropore and nanopore features in hollow antiresonant reflecting optical waveguides to create an electrical and optical analysis platform that can size select and detect a single nanoparticle. Micropores (...