Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation [0.03%]
集成静电激励的微加工干涉仪读出加速度计
Neal A Hall,Murat Okandan,Robert Littrell et al.
Neal A Hall et al.
A micromachined accelerometer device structure with diffraction-based optical detection and integrated electrostatic actuation is introduced. The sensor consists of a bulk silicon proof mass electrode that moves vertically with respect to a...
An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process [0.03%]
一种采用单片硅加工工艺的超微g值加速度计
N Yazdi,K Najafi
N Yazdi
This paper reports an all-silicon fully symmetrical z-axis micro-g accelerometer that is fabricated on a single-silicon wafer using a combined surface and bulk fabrication process. The microaccelerometer has high device sensitivity, low noi...