International Journal of Surface Science and Engineering. 2009;3(3):242-. doi: 10.1504/IJSURFSE.2009.026612 Q41.22025

Proposal of concurrent measurement method for spindle radial, axial and angular motions using concentric grating interferometers

Madden, Muhummad; Aketagawa, Masato; Ohkubo, Yuria; Kimura, Shohei; Maruyama, Hideki; Higuchi, Satoru; Okuyama, Eiki

DOI: 10.1504/IJSURFSE.2009.026612

摘要

期刊名：International journal of surface science and engineering

缩写：INT J SURF SCI ENG

ISSN：1749-785X

e-ISSN：1749-7868

IF/分区：1.2/Q4

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