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International Journal of Surface Science and Engineering. 2009;3(3):195-. doi: 10.1504/IJSURFSE.2009.026609 Q41.22025

Scanning in situ self-calibration method for the two-probe method of straightness measurement

Arai, Yoshikazu; Lee, Jung Chul; Park, Chun Hong

DOI: 10.1504/IJSURFSE.2009.026609

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Copyright © International Journal of Surface Science and Engineering. 中文内容为AI机器翻译,仅供参考!

期刊名:International journal of surface science and engineering

缩写:INT J SURF SCI ENG

ISSN:1749-785X

e-ISSN:1749-7868

IF/分区:1.2/Q4

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Scanning in situ self-calibration method for the two-probe method of straightness measurement