International Journal of Surface Science and Engineering. 2009;3(1/2):64-. doi: 10.1504/IJSURFSE.2009.024362 Q41.22025

Determination of Young's modulus and yield strength of porous low-k dielectric films by nanoindentation under complete consideration of the substrate influence

完全考虑基底影响的纳米压痕法测定多孔低k介电薄膜的杨氏模量和屈服强度

Herrmann, M.; Richter, F.

DOI: 10.1504/IJSURFSE.2009.024362

摘要

期刊名：International journal of surface science and engineering

缩写：INT J SURF SCI ENG

ISSN：1749-785X

e-ISSN：1749-7868

IF/分区：1.2/Q4

全文链接

官方链接

PMC全文

引文链接

复制

已复制！

格式：