Applied Physics Express. 2009;2(11):111004-. doi: 10.1143/apex.2.111004 Q32.52025

Effects of Substrate Plane on the Growth of High Quality AlN by Hydride Vapor Phase Epitaxy

衬底平面对氢化物气相外延生长高质量氮化铝的影响

DOI: 10.1143/apex.2.111004

摘要

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