Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology. 2007;221(1):1-9. doi: 10.1243/13506501JET183 Q31.82025

Design analysis and experimental study of aerostatic linear guideways used in a high acceleration and high precision xy stage

高加速度高精度xy载物台气体静压直线导轨的设计分析与实验研究

DOI: 10.1243/13506501JET183

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