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Chinese Physics Letters. 2007;24(12):3477-3480. doi: 10.1088/0256-307X/24/12/051 Q14.22025

Structural and Optical Properties of Zinc Nitride Films Prepared by Pulsed Filtered Cathodic Vacuum Arc Deposition

脉冲过滤阴极真空电弧沉积法制备的氮化锌薄膜的结构与光学性能

Ebru, Şenadim Tüzemen; Hamide, Kavak; Ramazan, Esen

DOI: 10.1088/0256-307X/24/12/051

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Copyright © Chinese Physics Letters. 中文内容为AI机器翻译,仅供参考!

期刊名:Chinese physics letters

缩写:CHINESE PHYS LETT

ISSN:0256-307X

e-ISSN:1741-3540

IF/分区:4.2/Q1

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Structural and Optical Properties of Zinc Nitride Films Prepared by Pulsed Filtered Cathodic Vacuum Arc Deposition