Chinese Physics Letters. 2006;23(5):1211-1214. doi: 10.1088/0256-307X/23/5/041 Q14.22025

A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System Pressure Sensors

DOI: 10.1088/0256-307X/23/5/041

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