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Journal of wuhan university of technology-materials science edition. 2007;22(1):126-128. doi: 10.1007/s11595-005-1126-y Q41.42025

Preparation and properties of a-Si:H thin films deposited on different substrates

不同基底上沉积的a-Si:H薄膜的制备与性能

Rui Rao

DOI: 10.1007/s11595-005-1126-y

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期刊名:Journal of wuhan university of technology-materials science edition

缩写:J WUHAN UNIV TECHNOL

ISSN:1000-2413

e-ISSN:1993-0437

IF/分区:1.4/Q4

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Preparation and properties of a-Si:H thin films deposited on different substrates