Journal of wuhan university of technology-materials science edition. 2007;22(1):126-128. doi: 10.1007/s11595-005-1126-y Q41.42025
Preparation and properties of a-Si:H thin films deposited on different substrates
不同基底上沉积的a-Si:H薄膜的制备与性能
DOI: 10.1007/s11595-005-1126-y
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