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Fabrication of 128+128 Element Row-Column Addressed 2D CMUT Arrays on a Borosilicate Glass Substrate Using Anodic Bonding and Trench Isolation of the Sealing Location

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Row-column addressed 2D ultrasonic transducer arrays require fewer connections compared to their fully addressed counterparts. This allows easier integration with electronics and convenience for high frame rate imaging. High frequency operation is required to ... ...