Sezawa-Mode Surface Acoustic Wave Resonators in Pulsed-Laser-Deposited Pb0.9Ba0.1(Zr0.52,Ti0.48)O3 on Bulk Silicon
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Barium-doped Lead Zirconate Titanate Pb0.9Ba0.1(Zr0.53Ti0.47)O3 films with a (001)-dominant orientation were deposited on bulk silicon (Si) substrates using pulsed laser deposition (PLD). Due to the large electromechanical coupling coefficient (K2) of the P(B)... ...