Low-Temperature Direct PECVD Synthesis of Graphene on Si(100) with Increased Methane Flow: Structure and Photoelectric Properties
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Graphene was directly synthesized on monocrystalline Si(100) at 500 °C by microwave plasma-enhanced chemical vapor deposition using an increased CH4/H2 gas flow ratio. Raman analysis revealed spectral features and intensity ratios consistent with the growth o... ...
