Design of Low-Loss Acoustic Delay Lines Enabled by Dual-Mode Interface Acoustic Waves in SiO2/ZnO/IDT/SU-8/SiO2 Structures
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The present work explores the modelling and design of Interface Acoustic Wave (IAW)-based delay lines in SiO2/ZnO (4 µm)/SU-8/SiO2 multilayer stacks and demonstrates that, by properly tailoring the acoustic wavelength and the SU-8 layer thickness, IAW delay l... ...