Pixel level anomaly detection in second harmonic generation microscopy for non destructive defect inspection of AlGaN/GaN heterostructures
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In this study, we present a semi-supervised inspection framework that integrates second harmonic generation (SHG) microscopy with pixel-level anomaly detection (PLAD) for high-sensitivity defect mapping in AlGaN/GaN heterostructures grown on Si (111). SHG is i... ...
