MOCVD Growth of κ‑Ga2O3 on Al-Rich Al x Ga1- x N Templates: Phase Diagram and Microstructural Evolution
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Orthorhombic κ-phase Ga2O3 is a metastable, ferroelectric polymorph of Ga2O3 with a large spontaneous polarization, offering a pathway to polarization-induced high-mobility 2D electron gases via κ-Ga2O3/Al x Ga1-x N heterostructures. Here, we map the metal-o... ...
