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Top-Gated Monolayer MoS2 Transistors on Growth Substrate by One-Step Integration of High-κ Dielectrics and Low-Resistance Bilayer Contacts

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Fabricating top-gated transistors of 2D semiconductors directly on growth substrates holds promise for unlocking their full potential, yet faces challenges in integrating dielectrics and high-quality contacts. Here, we report top-gated monolayer MoS2 (ML-MoS2)... ...