Real-Time Compositional Monitoring of Sputtered Li3PO4 Electrolyte Films via In Situ Optical Emission Spectroscopy
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Lithium phosphate (Li3PO4) is a key solid electrolyte for all-solid-state thin-film batteries. Although sputtering enables high-throughput film deposition, precise compositional control is essential because ionic conductivity is highly sensitive to stoichiomet... ...