Expanding the zinc precursor toolbox: a comparative study of precursors for thermal ALD of ZnO thin films
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Atomic layer deposition (ALD) of zinc oxide (ZnO) has been widely researched using diethyl zinc (DEZ)-based methods. The significant importance of thin films of ZnO as transparent conductive oxides (TCO) in optoelectronic devices and photovoltaics warrants exa... ...
