Stoichiometry and Thickness of Epitaxial SrTiO3 on Silicon (001): An Investigation of Physical, Optical, and Electrical Properties
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Strontium titanate (SrTiO3, STO) stands out as a promising material for various electronic applications thanks to its exceptional dielectric properties. Molecular beam epitaxy is one of the few techniques that allows epitaxial growth of STO directly on industr... ...
