High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process
{{output}}
Silicon photonics has emerged as critical for advancing photonic integrated circuits (PICs), but waveguide losses, primarily resulting from sidewall roughness, remain a primary challenge. In this work, we demonstrate a tri-layer hard mask etching process that ... ...
