Hybrid-integrated photonic circuits play a crucial role in recent quantum technologies. However, deterministic and alignment-tolerant methods are still lacking, and their development is crucial for accelerating the scalable fabrication of quantum systems. In this study, we demonstrate alignment-tolerant coupling between diamond and silicon nitride waveguides using the deterministic transfer-printing method. To validate this approach, we also demonstrate the capability of on-chip quantum sensing using nitrogen vacancy centers in diamond waveguides. These results pave the way for compact packaging of highly sensitive quantum sensors based on photonic integrated circuits.

混合集成光子电路在最近的量子技术中扮演着至关重要的角色。然而，确定性和对准容差方法仍然缺乏，其发展对于加速量子系统的可扩展制造至关重要。在这项研究中，我们展示了使用确定性转移印刷方法将金刚石和硅氮化物波导之间的对准容差耦合。为了验证这种方法的有效性，我们也演示了基于金刚石波导中的氮空位中心的片上量子传感的能力。这些结果为基于光子集成电路的高度敏感量子传感器的小型封装铺平了道路。