Cobalt Oxide (Co3O4) Thin Films Synthesized by Atmospheric Pressure PECVD: Deposition Mechanisms and Catalytic Potential
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Crystalline and electrocatalytically active cobalt oxide (Co3O4) thin films were successfully synthesized under open-air conditions using atmospheric pressure plasma-enhanced chemical vapor deposition (AP-PECVD) with the Co-(acac)3 precursor. This study explor... ...
