Optical and Transport Properties of ZnO Thin Films Prepared by Reactive Pulsed Mid-Frequency Sputtering Combined with RF ECWR Plasma
{{output}}
The study explores the optical and transport properties of polycrystalline ZnO thin films prepared using reactive pulsed mid-frequency sputtering with RF electron cyclotron wave resonance (ECWR) plasma. This deposition method increases the ionization degree of... ...
