A tip-tilt-piston electrothermal micromirror array with integrated position sensors
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A tip-tilt-piston 3 × 3 electrothermal micromirror array (MMA) integrated with temperature field-based position sensors is designed and fabricated in this work. The size of the individual octagonal mirror plates is as large as 1.6 mm × 1.6 mm. Thermal isolat... ...
