Influence of Substrate Bias Voltage on Structure and Properties of (AlCrMoNiTi)N Films
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(AlCrMoNiTi)N high-entropy alloy nitride (HEAN) films were synthesized at various bias voltages using the co-filter cathodic vacuum arc (co-FCVA) deposition technique. This study systematically investigates the effect of bias voltage on the microstructure and ... ...
