Local Droplet Etching with Indium Droplets on InP(100) by Metal-Organic Vapor Phase Epitaxy
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The local droplet etching (LDE) by using indium droplets on bare InP(100) surfaces is demonstrated in a metal-organic vapor phase epitaxy (MOVPE) environment for the first time. The role of an arsenic flow applied to self-assembled metallic indium droplets is ... ...
