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Journal of micro/nanolithography, MEMS, and MOEMS : JM3. 2017 Jun;16(2):10.1117/1.jmm.16.2.024003. doi: 10.1117/1.jmm.16.2.024003 Q31.52024

Multiple-Instrument Evaluation of the Consistency and Long Term Stability of Tip Width Calibration for Critical Dimension Atomic Force Microscopy

用于关键尺寸原子力显微镜针尖宽度刻度的一致性和长期稳定性的多重仪器评估 翻译改进

Ronald G Dixson  1, Ndubuisi G Orji  1

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作者单位

  • 1 National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899-8212.
  • DOI: 10.1117/1.jmm.16.2.024003 PMID: 39483644

    摘要 Ai翻译

    Since 2004 standards for calibration of critical dimension atomic force microscope (CD-AFM) tip width have been available both commercially and through national metrology institutes (NMIs) - such as the National Institute of Standards and Technology (NIST) in the United States. There have been inter-laboratory and inter-method comparisons performed on such samples, but less attention has been paid to the long-term stability of standards and monitoring for damage, wear, or contamination. Using three different CD-AFM instruments, we have tested the consistency and long-term stability of two independent reference calibrations for CD-AFM tip width. Both of these tip width calibrations were based on independently implemented transmission electron microscope (TEM) reference measurements. There were circumstances in which damage occurred or samples needed to be cleaned. Nevertheless, our results show agreement within the uncertainties and stability over a period exceeding 10 years.

    Keywords: CD-AFM; linewidth metrology; standards; traceability.

    Keywords:tip width calibration; multiple-instrument evaluation; long term stability

    Copyright © Journal of micro/nanolithography, MEMS, and MOEMS : JM3. 中文内容为AI机器翻译,仅供参考!

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    期刊名:Journal of micro-nanolithography mems and moems

    缩写:J MICRO-NANOLITH MEM

    ISSN:1932-5150

    e-ISSN:2708-8340

    IF/分区:1.5/Q3

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    Multiple-Instrument Evaluation of the Consistency and Long Term Stability of Tip Width Calibration for Critical Dimension Atomic Force Microscopy