Absolute Deflection Measurements in a Micro- and Nano-Electromechanical Fabry-Perot Interferometry System
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Fabry-Perot laser interferometry is a common laboratory technique used to interrogate resonant micro- and nano-electromechanical systems (MEMS/NEMS). This method uses the substrate beneath a vibrating MEMS/NEMS device as a static reference mirror, encoding rel... ...
