Low-resistivity Ohmic contacts of Ti/Al on few-layered 1T'-MoTe2/2H-MoTe2 heterojunctions grown by chemical vapor deposition
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This study explores the phase-controlled growth of few-layered 2H-MoTe2, 1T'-MoTe2, and 2H-/1T'-MoTe2 heterostructures and their impacts on metal contact properties. Cold-wall chemical vapor deposition (CW-CVD) with varying growth rates of MoOx and reaction te... ...
