Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrNx Films Prepared by Reactive DC Magnetron Sputtering
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ZrNx films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (r = N2/[Ar + N2]). The structure and composition of the thin films were characterized as a function of r using scanning electron micros... ...
