Micromachined Silicon Parallel Acoustic Delay Lines as Time Delayed Ultrasound Detector Array for Real-Time Photoacoustic Tomography
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This paper reports the development of a new 16-channel parallel acoustic delay line (PADL) array for real-time photoacoustic tomography (PAT). The PADLs were directly fabricated from single-crystalline silicon substrates using deep reactive ion etching. Compar... ...
