Effect of Nitrogen Flow Ratio on Composition, Microstructure, and Mechanical Properties of Cr-B-O-N Films Deposited by Pulsed Direct Current Magnetron Sputtering
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Nano-crystalline CrB₂ and Cr-B-O-N films with various nitrogen flow ratios were deposited using a pulsed direct current (PDC) magnetron sputtering technique. By means of electron probe micro-analysis, X-ray diffraction (XRD), X-ray photoelectron spectroscopy,... ...
