Effect of Oxygen Sputter Pressure on the Structural, Morphological and Optical Properties of ZnO Thin Films for Gas Sensing Application
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ZnO thin films were prepared on glass substrates at low (5 × 10-4 mbar) and high (3 × 10-3 mbar) sputter pressure using dc reactive magnetron sputtering. The structural, morphological, compositional and optical properties of the thin films were investigated.... ...
