Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
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The development of interfacial coherency stresses in TiN/AlN bilayer and multilayer films was investigated by finite element method (ABAQUS) using the four-node bilinear quadrilateral axisymmetric element CAX4R. The TiN and AlN layers are always in compression... ...
