Hollow waveguides with low intrinsic photoluminescence fabricated with Ta(2)O(5) and SiO(2) films
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A type of integrated hollow core waveguide with low intrinsic photoluminescence fabricated with Ta(2)O(5) and SiO(2) films is demonstrated. Hollow core waveguides made with a combination of plasma-enhanced chemical vapor deposition SiO(2) and sputtered Ta(2)O(... ...
