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Low Voltage Electrowetting-on-Dielectric Platform using Multi-Layer Insulators

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A low voltage, two-level-metal, and multi-layer insulator electrowetting-on-dielectric (EWD) platform is presented. Dispensing 300pl droplets from 140nl closed on-chip reservoirs was accomplished with as little as 11.4V solely through EWD forces, and the actua... ...