Influence of a combination of random noise and pattern-edge width (in pixels) on contrast-to-gradient image resolution in scanning electron microscopy
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The contrast-to-gradient (CG) method has been proposed previously for the evaluation of image resolution in scanning electron microscopy (SEM). In the CG algorithm, the image to be evaluated is gradually reduced to form the 1/r-reduced image (r = 1, 2, 3, ...)... ...
